22 results
8-K
EX-10.1
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4 Dec 12
Axcelis Technologies and Lam Research Enter Strategic Collaboration Agreement on Ion Implant, Dry-Strip, and Etch
12:00am
8-K
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29 May 12
Regulation FD Disclosure
12:00am
CORRESP
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6 Aug 10
Correspondence with SEC
12:00am
8-K
EX-10.1
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27 May 10
Entry into a Material Definitive Agreement
12:00am